TESPA-HAR

TESPA-HAR

42N/m, 320kHz, High Aspect Ratio Tip (5:1), Aluminum Reflective Coating

  • 42N/m, 320kHz, High Aspect Ratio Tip (5:1), Aluminum Reflective Coating

    High aspect ratio (HAR) probes are based upon Bruker technology and made from Bruker TESP probes using focused ion beam milling techniques.  The HAR process modifies the top portion of the tip to an aspect ratio of at least 5:1.  These probes are ideal for Tappingmode imaging on samples with tall/deep geometries, such as semiconductor trench imaging.

  • Tip Geometry: High Aspect Ratio
    Tip Height: 10 - 15
    Front Angle: 5 ± 1
    Back Angle: 5 ± 1
    Side Angle: 5 ± 1
    Tip Radius (Nom): 10
    Tip Radius (Max): 15
    Tip Set Back (Nom): 15
    Tip Set Back( RNG): 5 - 25
  • Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.

    Cantilever Material: 0.01 - 0.025 Ωcm Antimony (n) doped Si
    Cantilever Thickness (Nom): 4
    Cantilever Thickness (RNG): 3.25 - 4.75
    Cantilever Geometry: Rectangular
    Cantilevers Number: 1
    Back Side Coating: Reflective Aluminum