SCM-PTSI

Bruker SCM-PtSi Probes

For the highest resolution nanoelectrical measurements with outstanding wear resistance.

Bruker's new platinum silicide AFM probe is the ideal choice for Scanning Capacitance Microscopy measurements on the most advanced semiconductor features, providing the highest resolution imaging and long tip lifetime due to its outstanding wear resistant properties.

The Bruker SCM-PtSi probe provides:

• High resolution electrical imaging with an ultra-sharp conductive tip
• Consistent performance with high measurement lifetime
• Highly sensitive nanoelectrical measurements
• High quality probe manufactured at Bruker AFM Probes
• Other applications of the SCM-PtSi probe include: conductivity measurements Electrical Force Microscopy (EFM), and other characterization applications.

Bruker Atomic Force Microscopy group also provides many other nano-electrical probes and modes for AFM based electrical measurements including the unique PeakForce KPFM and PeakForce TUNA modes.